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J-GLOBAL ID：200902284901624038   Reference number：07A1216211

Self-assembly technique for MEMS vertical comb electrostatic actuator

MEMS垂直くし型静電アクチュエータのための自己構築技術

Author (6)： ISAMOTO K. (Santec Corp.) ,  MAKINO T. (Santec Corp.) ,  MOROSWA A. (Santec Corp.) ,  CHONG C. (Santec Corp.) ,  FUJITA H. (Inst. of Industrial Sci., Univ. of Tokyo) ,  TOSHIYOSHI H. (Inst. of Industrial Sci., Univ. of Tokyo)
Material： IEICE Electronics Express (Web)  (IEICE Electron Express (Web))
Volume： 2  Issue： 9  Page： 311-315 (J-STAGE)  Publication year： 2005 
JST Material Number： U0039A  ISSN： 1349-2543  Document type： Article
Article type： 原著論文  Country of issue： Japan (JPN)  Language： ENGLISH (EN)

Thesaurus term： *micro circuit technique ,...
Semi thesaurus term： sacrificial layer ,...

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JST classification (1)： Manufacturing technology of solid-state devices  (NC03030V)

Reference (6)：

• [1] W. C. Tang, T. C. H. Nguyen, M. W. Judy, and R. T. Howe, “Electrostatic-comb Drive of Lateral Polysilicon Resonators, ” Sens. Actuat., A21-A23, pp. 328-331, 1990.
• [2] L. Lin, R. T. Howe, and A. P. Pisano, “Microelectromechanical Filters for Signal Processing, ” IEEE J. Microelectromech. Syst., vol. 7, no. 3, pp. 286-294, 1998.
• [3] S. Kwon, V. Milanovic, and L. P. Lee, “Vertical Combdrive Based 2-D Gimbaled Micromirrors with Large Static Rotation by Backside Island Isolation, ” IEEE J. Select. Topics Quantum Electron., vol. 10, no. 3, pp. 498-503, 2004.
• [4] W. Piyawattanametha, P. R. Patterson, D. Hah, H. Toshiyoshi, and M. C. Wu, “A 2D scanner by surface and bulk micromachined angular vertical comb actuators, ” Proc. IEEE/LEOS Int. Conf. on Optical MEMS and Their Applications (MOEMS '03), Outrigger Waikoloa Beach, Hawaii, USA, Aug. 18-21, 2003.
• [5] R. R. A. Syms, “Self-Assembled 3-D Silicon Microscaners with Self-Assembled Electrostatic Drives, ” IEEE Photon. Technol. Lett., vol. 12, no. 11, pp. 1519-1521, 2000.

Terms in the title (5)： MEMS ,  垂直 ,  くし型 ,  静電アクチュエータ ,  自己構築