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J-GLOBAL ID:200902284964277788   Reference number:03A0380113

Measurement of Complex Index of Refraction of Tungsten by Using Ellipsometry-Study of the Accuracy of the Ellipsometer-

エリプソメトリーによるタングステンの複素屈折率の測定-エリプソメーター構築とその測定精度の検討-
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Volume: 87  Issue:Page: 328-334  Publication year: May. 01, 2003 
JST Material Number: G0205A  ISSN: 0019-2341  Document type: Article
Article type: 短報  Country of issue: Japan (JPN)  Language: JAPANESE (JA)
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Light sources,lighting apparatus  ,  Refractometry and reflectometry and their equipments 
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