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J-GLOBAL ID:200902288477265923   Reference number:04A0157316

3D microfabrication with inclined/rotated UV lithography

傾斜/回転UVリソグラフィーによる3次元微細加工
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Volume: A111  Issue:Page: 14-20  Publication year: Mar. 01, 2004 
JST Material Number: B0345C  ISSN: 0924-4247  Document type: Article
Article type: 原著論文  Country of issue: Netherlands (NLD)  Language: ENGLISH (EN)
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Manufacturing technology of solid-state devices 
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