Art
J-GLOBAL ID：200902288477265923   Reference number：04A0157316

3D microfabrication with inclined/rotated UV lithography

傾斜/回転UVリソグラフィーによる3次元微細加工
Author (4)：
HAN M

About HAN M

(Pohang Univ. Sci. and Technol., Kyongbuk, KOR)

About Pohang Univ. Sci. and Technol., Kyongbuk, KOR

, 
LEE W

About LEE W

(Pohang Univ. Sci. and Technol., Kyongbuk, KOR)

About Pohang Univ. Sci. and Technol., Kyongbuk, KOR

, 
LEE S-K

About LEE S-K

(Pohang Univ. Sci. and Technol., Kyongbuk, KOR)

About Pohang Univ. Sci. and Technol., Kyongbuk, KOR

, 
LEE S S

About LEE S S

(Pohang Univ. Sci. and Technol., Kyongbuk, KOR)

About Pohang Univ. Sci. and Technol., Kyongbuk, KOR


Material：
Sensors and Actuators. A. Physical  (Sens Actuators A)

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Volume： A111  Issue： 1  Page： 14-20  Publication year： Mar. 01, 2004 
JST Material Number： B0345C  ISSN： 0924-4247  Document type： Article
Article type： 原著論文  Country of issue： Netherlands (NLD)  Language： ENGLISH (EN)
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*fine patterning

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,...
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JST classification (1)：
JST classification
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Manufacturing technology of solid-state devices 
(NC03030V)

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Terms in the title (3)：
Terms in the title
Keywords automatically extracted from the title.
リソグラフィー

About リソグラフィー

, 
3次元

About 3次元

, 
微細加工

About 微細加工


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