Art

J-GLOBAL ID：200902289642972083   Reference number：06A1025220

Work function engineering using lanthanum oxide interfacial layers

酸化ランタン界面層を用いた仕事関数工学

Author (11)： ALSHAREEF H. N. (SEMATECH, 2706 Montopolis Dr., Austin, Texas 78741) ,  QUEVEDO-LOPEZ M. (SEMATECH, 2706 Montopolis Dr., Austin, Texas 78741) ,  WEN H. C. (SEMATECH, 2706 Montopolis Dr., Austin, Texas 78741) ,  HARRIS R. (SEMATECH, 2706 Montopolis Dr., Austin, Texas 78741) ,  KIRSCH P. (SEMATECH, 2706 Montopolis Dr., Austin, Texas 78741) ,  MAJHI P. (SEMATECH, 2706 Montopolis Dr., Austin, Texas 78741) ,  LEE B. H. (SEMATECH, 2706 Montopolis Dr., Austin, Texas 78741) ,  JAMMY R. (SEMATECH, 2706 Montopolis Dr., Austin, Texas 78741) ,  LICHTENWALNER D. J. (Dep. of Materials Sci. and Engineering, North Carolina State Univ., Raleigh, North Carolina 27695) ,  JUR J. S. (Dep. of Materials Sci. and Engineering, North Carolina State Univ., Raleigh, North Carolina 27695) ,  KINGON A. I. (Dep. of Materials Sci. and Engineering, North Carolina State Univ., Raleigh, North Carolina 27695)
Material： Applied Physics Letters  (Appl Phys Lett)
Volume： 89  Issue： 23  Page： 232103-232103-3  Publication year： Dec. 04, 2006 
JST Material Number： H0613A  ISSN： 0003-6951  CODEN： APPLAB  Document type： Article
Article type： 短報  Country of issue： United States (USA)  Language： ENGLISH (EN)

Thesaurus term： *lanthanum oxide ,...
Semi thesaurus term： cap-layer ,...

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JST classification (2)： Oxide thin films  (BK14050P) ,  Dielectrics in general  (BM05010F)

Terms in the title (4)： 酸化ランタン ,  界面層 ,  仕事関数 ,  工学