Art
J-GLOBAL ID：200902289714587104   Reference number：04A0113616

Applications of LIGA technology to precision manufacturing of high-aspect-ratio micro-components and -systems: a review

高アスペクト比のマイクロ部品とマイクロシステムの精密製造へのLIGA技術の応用
Author (2)：
MALEK C K

About MALEK C K

(Lab. Physique et Metrologie des Oscillateurs (LPMO)-CNRS, Besancon, FRA)

About Lab. Physique et Metrologie des Oscillateurs (LPMO)-CNRS, Besancon, FRA

, 
SAILE V

About SAILE V

(Univ. Karlsruhe, Karlsruhe, DEU)

About Univ. Karlsruhe, Karlsruhe, DEU


Material：
Microelectronics Journal  (Microelectron J)

About Microelectronics Journal


Volume： 35  Issue： 2  Page： 131-143  Publication year： Feb. 2004 
JST Material Number： A0186A  ISSN： 0026-2692  Document type： Article
Article type： 解説  Country of issue： United Kingdom (GBR)  Language： ENGLISH (EN)
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*micromachining

About micromachining

,...
Semi thesaurus term：
Thesaurus term/Semi thesaurus term
Keywords indexed to the article.
All keywords is available on JDreamIII(charged).
On J-GLOBAL, this item will be available after more than half a year after the record posted. In addtion, medical articles require to login to MyJ-GLOBAL.
LIGA

About LIGA

,...
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JST classification (1)：
JST classification
Category name(code) classified by JST.
Manufacturing technology of solid-state devices 
(NC03030V)

About Manufacturing technology of solid-state devices

Terms in the title (6)：
Terms in the title
Keywords automatically extracted from the title.
高アスペクト比

About 高アスペクト比

, 
マイクロ部品

About マイクロ部品

, 
マイクロシステム

About マイクロシステム

, 
精密

About 精密

, 
LIGA技術

About LIGA技術

, 
応用

About 応用


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