Surface Modification and Direct Bonding of Different Materials Irradiated H<sub>2</sub>O Ion

NISHIMOTO Kazufumi; ISHIZAWA Naoya; UEDA Hiroyasu; NODA Daiji; HATTORI Tadashi

Art

J-GLOBAL ID：200902290621372408 Reference number：08A0466423

Surface Modification and Direct Bonding of Different Materials Irradiated H₂O Ion

H₂Oイオン照射した異種材料の表面改質および直接接合

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Author (5)： , , , ,
Material：
Volume： 2 Issue： 2 Page： 197-202 (J-STAGE) Publication year： 2008
JST Material Number： U0027A ISSN： 1881-3054 Document type： Article
Article type：原著論文 Country of issue： Japan (JPN) Language： ENGLISH (EN)

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Manufacturing technology of solid-state devices

Reference (3)：

[1] Masao NAGAKUBO, Harumi SUZUKI, Tadashi HATTORI: “Direct Bonding between Aluminum and Silicon by the Formation of Hydrogen of Bonds”, JSME Series A, Vol. 40, No 4 (1997) in Japanese
[2] H. Ueda, H. Ueno, K. Itoigawa, T. Hattori, “Electrostatic Capacity Type Micro Inclination Sensor Utilizing Dielectric Nano-Paticles”, Proceedings of 2006 International Symposium on Micro-Nanomechatronics and Human Science, Nagoya, Japan, 2006, pp 545-550.
[3] Shuhei Yamashita, Yoshifumi Matsumoto, Kazuyoshi Idei, Kouichi Okuda, Daiji Noda and Tadashi Hattori “An Electromagnetic Actuator Using a Cylindrical Coil Created with 3-D X-ray Lithography and Metallization Techniques”, Proceedings of 2006 International Symposium on Micro-Nanomechatronics and Human Science, Nagoya, Japan, 2006, pp 143-148.

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Surface Modification and Direct Bonding of Different Materials Irradiated H2O Ion

Surface Modification and Direct Bonding of Different Materials Irradiated H₂O Ion