Art

J-GLOBAL ID：200902291984617336   Reference number：08A0914797

Fatigue-resistant epitaxial Pb(Zr,Ti)O₃ capacitors on Pt electrode with ultra-thin SrTiO₃ template layers

極薄SrTiO₃テンプレート層をもつPt電極上に疲労耐性をもつエピタキシャルPb(Zr,Ti)O₃コンデンサ

Author (7)： TAKAHARA Seiichi (Div. of Electrical Eng. and Computer Sci., Graduate School of Natural Sci. and Technol., Kanazawa Univ. ...) ,  MORIMOTO Akiharu (Div. of Electrical Eng. and Computer Sci., Graduate School of Natural Sci. and Technol., Kanazawa Univ. ...) ,  KAWAE Takeshi (Div. of Electrical Eng. and Computer Sci., Graduate School of Natural Sci. and Technol., Kanazawa Univ. ...) ,  KUMEDA Minoru (Div. of Electrical Eng. and Computer Sci., Graduate School of Natural Sci. and Technol., Kanazawa Univ. ...) ,  YAMADA Satoru (Dep. of Electronic Engineering, Ishikawa National Coll. of Technol., Tsubata 929-0392, JPN) ,  OHTSUBO Shigeru (Dep. of Electronic Engineering, Ishikawa National Coll. of Technol., Tsubata 929-0392, JPN) ,  YONEZAWA Yasuto (Industrial Res. Inst. of Ishikawa, Kanazawa 920-0223, JPN)
Material： Thin Solid Films
Volume： 516  Issue： 23  Page： 8393-8398  Publication year： Oct. 01, 2008 
JST Material Number： B0899A  ISSN： 0040-6090  Document type： Article
Article type： 原著論文  Country of issue： Netherlands (NLD)  Language： ENGLISH (EN)

Thesaurus term： ultrathin film ,  strontium titanate ,  template effect ,  epitaxy ,  *lead zirconate titanate ,  stoichiometry ,  substrate(plate) ,  magnesium oxide ,  perovskite type crystal ,  *condenser(capacitor) ,  *dielectric thin film ,  platinum electrode ,  *laser deposition ,  pulsed laser irradiation ,  X-ray photoelectron spectrum ,  *ferroelectrics ,  X-ray diffraction ,  *hysteresis ,  polarization(phenomenon) ,  leakage current ,  *fatigue strength
Semi thesaurus term： PZT

JST classification (2)： Oxide thin films  (BK14050P) ,  Ferroelectrics,antiferroelectrics and ferroelasticity  (BM05030B)

Terms in the title (10)： テンプレート ,  Pt ,  疲労 ,  耐性 ,  エピタキシャル ,  Pb ,  Zr ,  Ti ,  O3 ,  コンデンサ