Art
J-GLOBAL ID:200902292171275019   Reference number:04A0712670

Excimer laser micromachining for 3D microstructure

3Dミクロ構造のためのエキシマレーザーマイクロマシニング
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Volume: 149  Issue: 1/3  Page: 561-566  Publication year: Jun. 10, 2004 
JST Material Number: H0650A  ISSN: 0924-0136  Document type: Article
Article type: 原著論文  Country of issue: Netherlands (NLD)  Language: ENGLISH (EN)
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Special machining  ,  Machining and finishing in general 
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