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J-GLOBAL ID：200902292171275019   Reference number：04A0712670

Excimer laser micromachining for 3D microstructure

3Dミクロ構造のためのエキシマレーザーマイクロマシニング
Author (4)：
CHOI K H

About CHOI K H

(Cheju National Univ., Jeju, KOR)

About Cheju National Univ., Jeju, KOR

, 
MEIJER J

About MEIJER J

(Univ. Twente, Enschede, NLD)

About Univ. Twente, Enschede, NLD

, 
MASUZAWA T

About MASUZAWA T

(Univ. Tokyo, Tokyo, JPN)

About Univ. Tokyo, Tokyo, JPN

, 
KIM D-H

About KIM D-H

(Cheju National Univ., Jeju, KOR)

About Cheju National Univ., Jeju, KOR


Material：
Journal of Materials Processing Technology  (J Mater Process Technol)

About Journal of Materials Processing Technology


Volume： 149  Issue： 1/3  Page： 561-566  Publication year： Jun. 10, 2004 
JST Material Number： H0650A  ISSN： 0924-0136  Document type： Article
Article type： 原著論文  Country of issue： Netherlands (NLD)  Language： ENGLISH (EN)
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*laser beam drilling

About laser beam drilling

,...
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JST classification (2)：
JST classification
Category name(code) classified by JST.
Special machining 
(QC04000Y)

About Special machining

,  Machining and finishing in general 
(YH04111G)

About Machining and finishing in general

Terms in the title (2)：
Terms in the title
Keywords automatically extracted from the title.
3D

About 3D

, 
ミクロ構造

About ミクロ構造


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