Art
J-GLOBAL ID：200902292520700342   Reference number：06A0599022

Electrical breakdown phenomena for devices with micron separations

ミクロン間隔をもつデバイスの電気破壊現象
Author (3)：
CHEN Ching-Heng

About CHEN Ching-Heng

(National Tsing Hua Univ., Hsinchu, TWN)

About National Tsing Hua Univ., Hsinchu, TWN

, 
YEH J Andrew

About YEH J Andrew

(National Tsing Hua Univ., Hsinchu, TWN)

About National Tsing Hua Univ., Hsinchu, TWN

, 
WANG Pei-Jen

About WANG Pei-Jen

(National Tsing Hua Univ., Hsinchu, TWN)

About National Tsing Hua Univ., Hsinchu, TWN


Material：
Journal of Micromechanics and Microengineering  (J Micromech Microeng)

About Journal of Micromechanics and Microengineering


Volume： 16  Issue： 7  Page： 1366-1373  Publication year： Jul. 2006 
JST Material Number： W1424A  ISSN： 0960-1317  CODEN： JMMIEZ  Document type： Article
Article type： 原著論文  Country of issue： United Kingdom (GBR)  Language： ENGLISH (EN)
Thesaurus term：
Thesaurus term/Semi thesaurus term
Keywords indexed to the article.
All keywords is available on JDreamIII(charged).
On J-GLOBAL, this item will be available after more than half a year after the record posted. In addtion, medical articles require to login to MyJ-GLOBAL.
micromachine

About micromachine

,...
Semi thesaurus term：
Thesaurus term/Semi thesaurus term
Keywords indexed to the article.
All keywords is available on JDreamIII(charged).
On J-GLOBAL, this item will be available after more than half a year after the record posted. In addtion, medical articles require to login to MyJ-GLOBAL.
machining accuracy

About machining accuracy


   To see more with JDream III (charged).   {{ this.onShowAbsJLink("http://jdream3.com/lp/jglobal/index.html?docNo=06A0599022&from=J-GLOBAL&jstjournalNo=W1424A") }}
JST classification (2)：
JST classification
Category name(code) classified by JST.
Design,manufacturing,and components of robots 
(IC04013A)

About Design,manufacturing,and components of robots

,  Manufacturing technology of solid-state devices 
(NC03030V)

About Manufacturing technology of solid-state devices

Terms in the title (2)：
Terms in the title
Keywords automatically extracted from the title.
破壊

About 破壊

, 
現象

About 現象


Return to Previous Page

TOP

BOTTOM