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J-GLOBAL ID:200902292662792651   Reference number:05A0303306

NO2 Gas Sensor Made of Porous MoO3 Sputtered Films

多孔質MoO3スパッタ膜からできたNO2ガスセンサ
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Volume: 44  Issue: 1B  Page: 792-795  Publication year: Jan. 30, 2005 
JST Material Number: G0520B  ISSN: 0021-4922  Document type: Article
Article type: 原著論文  Country of issue: Japan (JPN)  Language: ENGLISH (EN)
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Oxide thin films  ,  Other solid-state devices 
Reference (25):
  • 1) L. Shi, Y. Hasegawa, T. Katsube, K. Onoue and K. Nakamura: Sensor Actuat. B 99 (2004) 361.
  • 2) T. K. H. Starke, G. S. V. Coles and H. Ferkel: Sensor Actuat. B: 85 (2002) 239.
  • 3) A. Karthigeyan, R. P. Gupata, K. Scharnagl, M. Burgmair, M. Zimmer, S. K. Sharma and I. Eisele: Sensor Actuat. B 78 (2001) 69.
  • 4) B. Ruhland, T. Becker and G. Müller: Sensor Actuat. B 50 (1998) 85.
  • 5) L. G. Teoh, Y. M. Hon, J. Shieh, W. H. Lai and M. H. Hon: Sensor Actuat. B 96 (2003) 219.
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