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J-GLOBAL ID:200902292722207494   Reference number:08A1128308

Adhesion of Atmospheric Micro-Contaminants on SUS304 Steel Surface and Their Removal by UV-O3 Treatment

SUS304鋼表面でのミクロな大気汚染物の付着および紫外線・オゾン処理によるそれらの除去
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Material:
Volume: 72  Issue: 11  Page: 856-862 (J-STAGE)  Publication year: 2008 
JST Material Number: G0023A  ISSN: 0021-4876  CODEN: NIKGAV  Document type: Article
Article type: 原著論文  Country of issue: Japan (JPN)  Language: JAPANESE (JA)
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Surface treatment in general 
Reference (16):
  • 1) Materials Science Society of Japan: Surface Treatment in Materials, (Shokabo, Co., Tyoko, 1996) pp. 1-234.
  • 2) Toray Research Center: Cleaning Technology for Electronics, (Toray Research Center, Inc., 2005) pp. 1-22.
  • 3) Editing Committee of Seimitsu Senjyou Soutsi to Saishin Ouyou Gijyutsu: Seimitsu Senjyou Soutsi to Saishin Ouyou Gijyutsu, (Kou Gyou Siryou Center, Inc., 1991) pp. 447-458.
  • 4) S. Suzuki, S. Ichimura, A. Kurokawa, Y. Ishikawa, M. Isshiki and Y. Waseda: Mater Trans. JIM 38(1997) 451-456.
  • 5) M. Yaguchi: Senjyou Gijyutsu Seihin Hyakka, (Kogyo Chosakai Publishing, Inc.,1995) pp. 82-89
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