Art

J-GLOBAL ID：200902293306074619   Reference number：06A0510053

Thermal stability of diamond-like carbon films deposited by plasma based ion implantation technique with bipolar pulses

二極パルスを持つプラズマ利用イオン注入技術によって堆積させたダイヤモンド状炭素膜の熱安定性

Author (5)： CHOI Junho (Materials Res. Inst. for Sustainable Dev., National Inst. of Advanced Industrial Sci. and Technol. (AIST), 2266-98 ...) ,  MIYAGAWA Soji (Materials Res. Inst. for Sustainable Dev., National Inst. of Advanced Industrial Sci. and Technol. (AIST), 2266-98 ...) ,  NAKAO Setsuo (Materials Res. Inst. for Sustainable Dev., National Inst. of Advanced Industrial Sci. and Technol. (AIST), 2266-98 ...) ,  IKEYAMA Masami (Materials Res. Inst. for Sustainable Dev., National Inst. of Advanced Industrial Sci. and Technol. (AIST), 2266-98 ...) ,  MIYAGAWA Yoshiko (Materials Res. Inst. for Sustainable Dev., National Inst. of Advanced Industrial Sci. and Technol. (AIST), 2266-98 ...)
Material： Diamond and Related Materials  (Diam Relat Mater)
Volume： 15  Issue： 4-8  Page： 948-951  Publication year： Apr. 2006 
JST Material Number： W0498A  ISSN： 0925-9635  Document type： Article
Article type： 原著論文  Country of issue： Netherlands (NLD)  Language： ENGLISH (EN)

Thesaurus term： ion implantation ,...

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JST classification (2)： Carbon and its compounds  (YB02060D) ,  Thin films of other inorganic compounds  (BK14060A)

Terms in the title (6)： パルス ,  プラズマ ,  イオン注入 ,  堆積 ,  ダイヤモンド状炭素 ,  熱安定性