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J-GLOBAL ID:200902294759360040   Reference number:03A0868952

Sonoplasma generated by a combination of ultrasonic waves and microwave irradiation

超音波とマイクロ波の組合わせ照射で発生したソノプラズマ
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Volume: 83  Issue: 22  Page: 4503-4505  Publication year: Dec. 01, 2003 
JST Material Number: H0613A  ISSN: 0003-6951  CODEN: APPLAB  Document type: Article
Article type: 短報  Country of issue: United States (USA)  Language: ENGLISH (EN)
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Manufacturing technology of solid-state devices  ,  Discharge in liquids and solids 
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