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J-GLOBAL ID：200902294976898465   Reference number：05A0703514

Nanometer-Order Resolution Displacement Measurement System by Air-Coupled Ultrasonic Wave Introducing Maximum Phase-Sensitivity Tuning

最大位相感度同調での空気結合超音波による分解能ナノメタオーダの変位測定

Author (3)： SASAKI Katsuhiro (Akita Univ., Akita, JPN) ,  NISHIHIRA Morimasa (Akita Univ., Akita, JPN) ,  IMANO Kazuhiko (Akita Univ., Akita, JPN)
Material： Japanese Journal of Applied Physics. Part 1. Regular Papers, Short Notes & Review Papers  (Japanese Journal of Applied Physics. Part 1. Regular Papers, Brief Communications & Review Papers)
Volume： 44  Issue： 6B  Page： 4411-4416  Publication year： Jun. 30, 2005 
JST Material Number： G0520B  ISSN： 0021-4922  Document type： Article
Article type： 原著論文  Country of issue： Japan (JPN)  Language： ENGLISH (EN)

Thesaurus term： atmosphere (location) ,...

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JST classification (2)： Measuring methods and instruments of length,area,cross section,volume,angle  (AD05020O) ,  Acoustical measurements and instrumentation  (BB03040R)

Reference (16)：

• 1) H. Elmer and H. Schweinzer: IEEE Instrum. Meas. Tech. Conf. (Anchorage, AK, USA, 2002) p. 1565.
• 2) M. Parrilla, J. J. Anaya and C. Frisch: IEEE Trans. Instrum. Meas. 40 (1991) 759.
• 3) D. Marioli, C. Narduzzi, C. Offelli, D. Petri, E. Sardini and A. Taroni: IEEE Trans. Instrum. Meas. 41 (1992) 93.
• 4) M. Horiuchi: Automation 45 (2000) 30 [in Japanese].
• 5) T. Kimura, S. Wadaka, K. Misu, T. Nagatska, T. Tajime and M. Koike: Proc. IEEE Ultrason. Symp. 1 (1995) 737.

Terms in the title (6)： 位相 ,  感度 ,  同調 ,  超音波 ,  分解能 ,  変位測定