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J-GLOBAL ID:200902294976898465   Reference number:05A0703514

Nanometer-Order Resolution Displacement Measurement System by Air-Coupled Ultrasonic Wave Introducing Maximum Phase-Sensitivity Tuning

最大位相感度同調での空気結合超音波による分解能ナノメタオーダの変位測定
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Volume: 44  Issue: 6B  Page: 4411-4416  Publication year: Jun. 30, 2005 
JST Material Number: G0520B  ISSN: 0021-4922  Document type: Article
Article type: 原著論文  Country of issue: Japan (JPN)  Language: ENGLISH (EN)
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Measuring methods and instruments of length,area,cross section,volume,angle  ,  Acoustical measurements and instrumentation 
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