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J-GLOBAL ID：200902295818968584   Reference number：05A0634814

Preparation of tin oxide films on various substrates by excimer laser metal organic deposition

エキシマレーザ有機金属堆積による種々の基板上への酸化すず膜の成膜
Author (6)：
TSUCHIYA T.

About TSUCHIYA T.

(National Inst. of Advanced Industrial Sci. and Technol., Tsukuba Central 5, 1-1-1 Higashi, Tsukuba 305-8565, JPN)

About National Inst. of Advanced Industrial Sci. and Technol., Tsukuba Central 5, 1-1-1 Higashi, Tsukuba 305-8565, JPN

, 
DAOUDI K.

About DAOUDI K.

(National Inst. of Advanced Industrial Sci. and Technol., Tsukuba Central 5, 1-1-1 Higashi, Tsukuba 305-8565, JPN)

About National Inst. of Advanced Industrial Sci. and Technol., Tsukuba Central 5, 1-1-1 Higashi, Tsukuba 305-8565, JPN

, 
YAMAGUCHI I.

About YAMAGUCHI I.

(National Inst. of Advanced Industrial Sci. and Technol., Tsukuba Central 5, 1-1-1 Higashi, Tsukuba 305-8565, JPN)

About National Inst. of Advanced Industrial Sci. and Technol., Tsukuba Central 5, 1-1-1 Higashi, Tsukuba 305-8565, JPN

, 
MANABE T.

About MANABE T.

(National Inst. of Advanced Industrial Sci. and Technol., Tsukuba Central 5, 1-1-1 Higashi, Tsukuba 305-8565, JPN)

About National Inst. of Advanced Industrial Sci. and Technol., Tsukuba Central 5, 1-1-1 Higashi, Tsukuba 305-8565, JPN

, 
KUMAGAI T.

About KUMAGAI T.

(National Inst. of Advanced Industrial Sci. and Technol., Tsukuba Central 5, 1-1-1 Higashi, Tsukuba 305-8565, JPN)

About National Inst. of Advanced Industrial Sci. and Technol., Tsukuba Central 5, 1-1-1 Higashi, Tsukuba 305-8565, JPN

, 
MIZUTA S.

About MIZUTA S.

(National Inst. of Advanced Industrial Sci. and Technol., Tsukuba Central 5, 1-1-1 Higashi, Tsukuba 305-8565, JPN)

About National Inst. of Advanced Industrial Sci. and Technol., Tsukuba Central 5, 1-1-1 Higashi, Tsukuba 305-8565, JPN


Material：
Applied Surface Science  (Appl Surf Sci)

About Applied Surface Science


Volume： 247  Issue： 1-4  Page： 145-150  Publication year： Jul. 15, 2005 
JST Material Number： B0707B  ISSN： 0169-4332  Document type： Article
Article type： 原著論文  Country of issue： Netherlands (NLD)  Language： ENGLISH (EN)
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pulsed laser irradiation

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,...
Semi thesaurus term：
Thesaurus term/Semi thesaurus term
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KrF laser

About KrF laser

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Oxide thin films 
(BK14050P)

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Terms in the title (5)：
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エキシマレーザ

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, 
有機金属

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, 
堆積

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, 
酸化すず

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, 
成膜

About 成膜


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