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J-GLOBAL ID:200902296201656247   Reference number:08A1111450

水中プラズマが拓く新しい無機・有機・バイオプロセス 3 水中プラズマによる材料(無機)プロセス

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Volume: 84  Issue: 10  Page: 674-678  Publication year: Oct. 25, 2008 
JST Material Number: G0114A  ISSN: 0918-7928  Document type: Article
Article type: 解説  Country of issue: Japan (JPN)  Language: JAPANESE (JA)
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Thin films of other inorganic compounds  ,  Applications of plasma 
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