Art
J-GLOBAL ID：200902297169885596   Reference number：04A0477086

Electrostatically driven mirror device using torsion bar having tensile stress

引張応力のあるトーションバーを用いた静電駆動型ミラーデバイス
Author (3)：
YUKI SHIN'YA

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(東北大)

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, 
SASAKI MINORU

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(東北大)

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, 
HANE KAZUHIRO

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(東北大)

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Material：
電気学会フィジカルセンサ研究会資料  (電気学会研究会資料)

About 電気学会フィジカルセンサ研究会資料


Volume： PHS-04  Issue： 6-13  Page： 11-15  Publication year： May. 13, 2004 
JST Material Number： L2897B  Document type： Proceedings
Article type： 原著論文  Country of issue： Japan (JPN)  Language： JAPANESE (JA)
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*micromachine

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planar array antenna

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Manufacturing technology of solid-state devices 
(NC03030V)

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Reference (3)：
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引張応力

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, 
トーションバー

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, 
静電駆動

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, 
ミラー

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