Art
J-GLOBAL ID:200902298191669810   Reference number:03A0460903

CMOS Integrated Gas Sensor Chip Using SAW Technology

SAW技術を用いたCMOS集積化ガスセンサ
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Material:
Volume: 2003  Issue: Vol.4  Page: IV.848-IV.851  Publication year: 2003 
JST Material Number: A0757A  ISSN: 0271-4302  Document type: Proceedings
Article type: 原著論文  Country of issue: United States (USA)  Language: ENGLISH (EN)
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Measuring instruments in general  ,  Surface acoustic wave devices  ,  General 
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