Electron-stimulated athermal surface recrystallization of Si(100)

NARUSHIMA T; KITAJIMA M; MIKI K

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J-GLOBAL ID：200902298761228758 Reference number：04A0348083

Electron-stimulated athermal surface recrystallization of Si(100)

Si(100)に関する電子誘導非熱的表面再結晶

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Author (3)： , ,
Material：
Volume： 16 Issue： 13 Page： L193-L200 Publication year： Apr. 07, 2004
JST Material Number： B0914B ISSN： 0953-8984 CODEN： JCOMEL Document type： Article
Article type：短報 Country of issue： United Kingdom (GBR) Language： ENGLISH (EN)

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Surface structure of semiconductors

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