Proj
J-GLOBAL ID:200904009667436210  Research Project code:9800004122 Update date:Dec. 10, 2004

Optical properties of amorphous and crystalline semiconductors measured by high precision spectroscopic ellipsometer

高精度分光エリプソメータの開発と非晶質及び結晶性半導体の光学特性の評価
Study period:1985 - 0
Organization (1):
Investigating Researcher (1):
Research overview:
Highly precise 4 zone null spectroscopic ellipsometer is constructed and used for measurements of optical properties of amorphous and crystalline semiconductors.
Keywords (5):
semiconductor ,  amorphous ,  quenching(light) ,  ellipsometer ,  optical
Research program: Ordinary Research

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