Proj
J-GLOBAL ID:200904009918153370  Research Project code:9800036346 Update date:Nov. 04, 1997

Study on refining of silicon using the plasma melting method

プラズマ溶解法によるシリコンの精製
Study period:1994 - 1994
Organization (1):
Investigating Researcher (1):
Keywords (9):
plasma ,  silicon ,  purification ,  argon ,  pot ,  boron ,  degassing ,  water ,  removal
Research program: Ordinary Research
Ministry with control over the research :
Ministry of Education, Culture, Sports, Science and Technology

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