J-GLOBAL ID:200904012614782991  Research Project code:9800039138 Update date:Dec. 15, 2003

A study of gas-solid reactions for improving properties of thin films formed by using PVD methods

Study period:1996 - 1996
Organization (1):
Investigating Researcher (2):
Research overview:
A purpose of present study is improving some properties of thin films formed by using PVD methods, for example ion planting, by heating thin films in the atmospheres of various gas species. Experiment consists of the selection of thin films fit for the heating process, the selection of forming methods for thin films and gas species, and the decision of the optimum conditions.
Keywords (5):
physical ,  evaporated ,  gas-solid ,  gas ,  optimum
Research program: Ordinary Research
Research budget: 1996: \250,000

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