Proj
J-GLOBAL ID:200904012655286354  Research Project code:9800021177 Update date:Dec. 13, 1996

Development of laser processing techniques for high-definition patterns

レーザ微細パターン加工技術に関する研究
Study period:1993 - 1994
Organization (1):
Investigating Researcher (4):
Research overview:
To realize the laser processing of high-definition patterns, the methods for fine control of the processing table using the CAD data will be studied.
Keywords (5):
laser ,  numerical ,  pattern ,  CAD ,  fine
Research program: Ordinary Research
Research budget: 1994: \1,670,000

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