Proj
J-GLOBAL ID:200904013966208469  Research Project code:9800033613 Update date:Dec. 15, 2003

Thin film preparation for optical sensors using laser ablation method

光センサー用薄膜作製のためのレーザアブレーション成膜法に関する調査研究
Study period:1995 - 1997
Organization (1):
Investigating Researcher (4):
Research overview:
A laser ablation equipment is adopted to prepare oxide thin films, since it easily achieves precise metal composition ofthe films. In addition, compensating oxygen deficiency, excited oxygen species are irradiated during ablation. By using this methods, intensive study are performed for optical sensors such as YBCO Josephson junction.
Keywords (4):
thin ,  optical ,  laser ,  oxide
Research program: Ordinary Research
Research budget: 1997: \223,000

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