J-GLOBAL ID:200904018086252452  Research Project code:9800004529 Update date:Jan. 21, 1997

An active air bearing

Study period:1987 - 1995
Organization (1):
Investigating Researcher (2):
Research overview:
An active air bearing which is a static air bearing combined with piezo actuators is introduced. The aim of the active air bearing is a high degree of motion accuracy, vibration damping and static and dynamic stiffness control.
Keywords (6):
air ,  piezoelectricity ,  actuator ,  motion ,  oscillation ,  rigidity
Research program: Ordinary Research
Research budget: 1995: \1,000,000

Return to Previous Page