Proj
J-GLOBAL ID:200904018664744541
Research Project code:9800026363
Update date:Mar. 31, 1995
Optical evaluation technology for semiconductor thin films
光学的手法による半導体薄膜の評価技術に関する研究
Study period:1994 - 1994
Organization (1):
Investigating Researcher (1):
Keywords (7):
semiconductor
, evaluation
, laser
, Raman
, structure
, electrical
, evaluation
Research program:
Ordinary Research
Research budget:
1994: \2,600,000
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