Proj
J-GLOBAL ID:200904018664744541  Research Project code:9800026363 Update date:Mar. 31, 1995

Optical evaluation technology for semiconductor thin films

光学的手法による半導体薄膜の評価技術に関する研究
Study period:1994 - 1994
Organization (1):
Investigating Researcher (1):
Keywords (7):
semiconductor ,  evaluation ,  laser ,  Raman ,  structure ,  electrical ,  evaluation
Research program: Ordinary Research
Research budget: 1994: \2,600,000

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