J-GLOBAL ID:200904018810490000  Research Project code:9800016895 Update date:Feb. 02, 2006

Study of the applications of piezoresistance devices

Study period:1992 - 1992
Organization (1):
Investigating Researcher (2):
Research overview:
Piezoresistance devices are prepared on any metals by thin film technology, their applications to a micro strain gaugewhich can detect strain on small area that is in the order of 10 .mu.m square and any other sensors are studied.
Keywords (4):
piezoresistance ,  strain ,  sensor ,  piezoelectric
Research program: Ordinary Research
Research budget: 1992: \111,000

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