Proj
J-GLOBAL ID:200904019809686819  Research Project code:9800009726 Update date:Nov. 25, 2003

Elucidation of heat transfer and fluid mechanics during GaAs LEC crystal growth

GaAs系LEC炉の熱・流動解析
Study period:1990 - 1998
Organization (1):
Investigating Researcher (1):
Research overview:
Finite element analyses for heat transfer and fluid flow during GaAs LEC crystal growth are carried out to investigatethe fundamental characteristics of the LEC furnace.
Keywords (7):
gallium arsenide ,  LEC method ,  heat transfer ,  flow analysis ,  finite element method ,  single crystal ,  furnace
Research program: Ordinary Research
Research budget: 1996: \1,500,000

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