Proj
J-GLOBAL ID:200904022286001630  Research Project code:9800034207 Update date:Dec. 15, 2003

Micromachining of brittle materials

硬脆材料のマイクロ加工
Study period:1993 - 0
Organization (1):
Investigating Researcher (2):
Research overview:
Development of micromachining technology for brittle materials such as ceramics. 3D shapes with the size ranging from several micrometers to tens of micrometers are targeted. Main applied methods are ultrasonic machining and laser machining.
Keywords (6):
fine ceramic ,  ultrasonic machining ,  laser beam machining ,  brittle material ,  precision machining ,  fine processing
Research program: Ordinary Research

Return to Previous Page