Proj
J-GLOBAL ID:200904022440490592  Research Project code:9800046390 Update date:Apr. 22, 1998

Study on collimation spatter

コリメーションスパッタ
Study period:1995 - 2000
Organization (1):
Investigating Researcher (1):
Keywords (3):
collimation ,  ion ,  sputtered
Research program: Ordinary Research
Research budget: 1998: \0

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