Proj
J-GLOBAL ID:200904025524141495  Research Project code:9800040256 Update date:Mar. 15, 2006

Basic study on forming technique of complex oxide thin film

複合酸化物薄膜の作製技術の基礎的研究
Study period:1993 - 1995
Organization (1):
Investigating Researcher (1):
Keywords (9):
dielectric ,  oxide ,  thin ,  perovskite ,  chemical ,  permittivity ,  piezoelectricity ,  pyroelectricity ,  electrooptic
Research program: SCF Encouragement of Basic Research
Ministry with control over the research :
Ministry of Economy, Trade and Industry
Organization with control over the research:
国立研究開発法人産業技術総合研究所
Research budget: 1995: \4,825,000

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