Proj
J-GLOBAL ID:200904026134547730  Research Project code:9800035927 Update date:Feb. 24, 2004

Analysis of impurity in the CVD-diamond with TEM, AES, XPS

TEM,AES,XPSによるCVDダイヤモンドの不純物分析に関する研究
Study period:1995 - 1995
Organization (1):
Investigating Researcher (1):
Research overview:
EACVD and ECR plasma CVD diamond thin films are analyzed by TEM, AES, XPS for purpose to improve CVD method.
Keywords (9):
electron ,  plasma ,  diamond ,  thin ,  Auger ,  X-ray ,  impurity ,  transmission ,  microscopy
Research program: Ordinary Research
Research budget: 1995: \0

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