J-GLOBAL ID:200904026648564358  Research Project code:9800043454 Update date:Dec. 15, 2003

Study on processing technique for development of micro-sensors

Study period:1997 - 1999
Organization (1):
Investigating Researcher (2):
Research overview:
Development of sensors by means of silicon micro-machining technique has often appeared in these years. Use of this technique has such merits as not only further miniaturization of existing products but also mass production being possible and integration being easy due to the material being silicon. With respect to this technique, this study is conducted on a series of elemental techniques necessary for sensor development like assembly as well as processing.
Keywords (4):
sensor ,  micromachining ,  assembly ,  technology
Research program: Ordinary Research
Research budget: 1998: \14,426,000

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