Proj
J-GLOBAL ID：200904026648564358
Research Project code：9800043454
Update date：Dec. 15, 2003
Study on processing technique for development of micro-sensors
マイクロセンサ開発のための加工技術の研究
Study period：1997 - 1999
Organization (1)：
Investigating Researcher (2)：
,
Research overview：
Development of sensors by means of silicon micro-machining technique has often appeared in these years. Use of this technique has such merits as not only further miniaturization of existing products but also mass production being possible and integration being easy due to the material being silicon. With respect to this technique, this study is conducted on a series of elemental techniques necessary for sensor development like assembly as well as processing.
Keywords (4)：
sensor
, micromachining
, assembly
, technology
Ordinary Research
Research budget：
1998: \14,426,000
Return to Previous Page
