Proj
J-GLOBAL ID:200904027952047250  Research Project code:9800017230 Update date:Aug. 13, 1996

Manufacturing technique of super hard thin films by PVD method

PVD法による超硬質薄膜の製造技術
Study period:1989 - 1992
Organization (1):
Investigating Researcher (1):
Keywords (5):
evaporated ,  physical ,  abrasion ,  hard ,  ceramic
Research program: Ordinary Research
Research budget: 1992: \0

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