Proj
J-GLOBAL ID:200904028395169832  Research Project code:9800030543 Update date:Mar. 15, 2006

Study on analysis and evaluation technique of micro area of materials using beam technology

ビーム技術を利用した材料の微小領域の解析・評価技術の研究
Study period:1994 - 1997
Organization (1):
Investigating Researcher (7):
Keywords (8):
crystal ,  surface ,  functional ,  beam ,  micro ,  X-ray ,  X-ray ,  Auger
Research program: Ordinary Research
Ministry with control over the research :
Ministry of Economy, Trade and Industry
Research budget: 1997: \4,780,000

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