Proj
J-GLOBAL ID:200904030361900150  Research Project code:6000001652 Update date:Dec. 21, 2007

Development of efficient Gas-deposition device

高性能ガスデポジション装置の開発
Study period:2005 - 2006
Research field (1): Electron/electric material engineering
Researcher representative of the project  (1):
  • 中村聖名
Research program: -

Return to Previous Page