Proj
J-GLOBAL ID:200904031237241063  Research Project code:9800007244 Update date:Dec. 15, 2003

Development of vacuum chucks applying sintered plastics

プラスチック多孔質体を用いた真空チャックの研究
Study period:1988 - 0
Organization (1):
Investigating Researcher (1):
Research overview:
In order to develop a vacuum chuck for precision cutting, precision grinding, precision polishing and dicing, which has low strain at the time of inhalation and does not damage a processed product, we make a performance valuation of a porous body using a plastic sintered body.
Keywords (7):
plastic ,  precision machining ,  sintered body ,  polishing(machining) ,  cutting(machining) ,  chuck ,  porous body
Research program: Ordinary Research

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