Proj
J-GLOBAL ID:200904032378459115  Research Project code:9800041953 Update date:Feb. 05, 1998

Study on film-making technique of the oxide thin film

酸化物薄膜の成膜技術に関する研究
Study period:1997 - 1997
Organization (1):
Investigating Researcher (1):
Keywords (4):
thin ,  oxide ,  thin ,  area
Research program: Ordinary Research
Research budget: 1997: \0

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