J-GLOBAL ID:200904034518951921  Research Project code:9800023627 Update date:May. 14, 2003

Preparation and property evaluation of shape memory alloy thin film used for micromachine by PVD method

Study period:1997 - 2001
Organization (1):
Investigating Researcher (1):
Research overview:
Study conducted so far has revealed that Ti-Ni alloy thin film prepared by sputtering has a shape memorizing characteristics equally matching bulk material and thus is a hopeful candidate of very small-sized driving device for micromachines. This study takes over the investigation of various factors of Ti-Ni thin film affecting shape-memorizing characteristics and also attempts creation of high performance shape memory alloy film of the composition different from bulk material by positive utilization of characteristic feature of sputtering, which is a non-equilibrium process. (k2001.10)
Keywords (6):
shape ,  metallic ,  characterization ,  robot ,  sputtering ,  thin
Research program: Ordinary Research
Ministry with control over the research :
Ministry of Education, Culture, Sports, Science and Technology
Organization with control over the research:
National Institute for Materials Science

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