Proj
J-GLOBAL ID:200904036439106194  Research Project code:9800002334 Update date:Jan. 19, 1994

Optical and electrical properties of tetrahedrally-bonded amorphous semiconductor thin films prepared by reactive magnetron sputtering

反応性マグネトロンスパッタリング法によるアモルファスシリコン系薄膜の光学的電気的性質と素子への応用
Study period:1982 - 1992
Organization (1):
Investigating Researcher (1):
Keywords (11):
amorphous ,  semiconductor ,  silicon ,  magnetron ,  solar ,  image ,  electrophotography ,  semiconductor ,  hydrogen ,  fluorine ,  thin
Research program: Ordinary Research

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