J-GLOBAL ID:200904041851126217  Research Project code:9800011747 Update date:Feb. 03, 2006

Development of functional ceramic sensor by compounding Study on relation between condition of SnO2 target preparationand that of the thin film formation by DC sputtering method

複合化による機能性セラミックセンサの開発 SnO2ターゲットの作成条件とDCスパッタ法による成膜 条件との関係について
Study period:1991 - 1993
Organization (1):
Investigating Researcher (1):
Research overview:
Study pursues functions and applications of various sorts of functional ceramics. In 1991 we study the relation between SnO2 target obtained under varied sintering temperature・time from stannic oxide with added impurities of several additives, and SnO2 thin film prepared by DC Magnetron sputtering method using the target.
Keywords (14):
tin ,  gas ,  functional ,  magnetron ,  direct ,  target ,  thin ,  composite ,  function(performance) ,  impurity ,  doping ,  dopant ,  sintering ,  semiconductor
Research program: Ordinary Research

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