Proj
J-GLOBAL ID:200904043131974574  Research Project code:9800015269 Update date:Mar. 31, 2004

Manufacturing technology for high density amorphous carbon film

高密度ガラス状炭素フィルムの製造技術
Study period:1990 - 1993
Keywords (6):
carbon ,  amorphous ,  densification ,  thin ,  density ,  carbon
Research program: The Other Research Programs
Research budget: 1992: \0

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