J-GLOBAL ID:200904045384477170  Research Project code:0350010845 Update date:Dec. 18, 2002

Study on fine microfabrication technique

Study period:2002 - 2004
Organization (1):
Investigating Researcher (1):
Research overview:
To develop devices for optical communication and biotic components by means of techniques of mirror grinding and fine cutting.
Keywords (2):
mirror finish ,  microfabrication
Research program: -

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