Proj
J-GLOBAL ID:200904050332950386  Research Project code:0250000607 Update date:Nov. 25, 2002

Study of maskless selective deposition by laser enhanced electroless plating

レーザーアシスト無電解析出によるマスクレス局所成膜に関する研究
Study period:2001 - 2001
Organization (1):
Investigating Researcher (1):
Research overview:
For the partial thin layer making in the fine wiring pattern formation process, resin has been generally utilized for masking. In this study, technique of directly making patterned thin layer is investigated by the use of electroless plating and liquid-phase deposition in combination, on the basis of applying local heating by highly directive laser beam. The study aims at resource-saving without use of meaningless resin and contribution to quicker processing.
Keywords (4):
laser enhanced plating ,  YAG laser ,  selective deposition ,  electoless plating
Research program: Ordinary Research

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