Proj
J-GLOBAL ID:200904051090852771  Research Project code:9800003261 Update date:Mar. 25, 1998

Application of impulsive force to micro-positioning

インパクトサーボ機構による微小精密位置決めの研究
Study period:1983 - 1996
Organization (1):
Investigating Researcher (1):
Keywords (4):
positioning ,  position ,  mobile ,  piezoelectric
Research program: Ordinary Research
Research budget: 1996: \0

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