Proj
J-GLOBAL ID:200904052308927473  Research Project code:9950000273 Update date:Mar. 16, 2006

Study of formation technology of standard strip with difference in level

段差基準片の形成技術の研究
Study period:1997 - 2000
Organization (2):
Investigating Researcher (3):
Research overview:
A crystal of a silicon single crystal is used as a geometric standard. A technology for forming a sample strip with difference in level for proofreading a micro measurement standard is to be studied.
Keywords (1):
段差基準,測定標準,校正,異方性エッチング
Research program: Ordinary Research
Research budget: 1999: \5,000,000

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