Research Project code：9800020685
Update date：Feb. 27, 2003
Development of tactile microsensors
1993 - 1993
Investigating Researcher (4)：
The tactile sensors are developed by using the micromachining techniques. The stress-strain of the sensors are simulated by a computer, and the stracture of it is decided by the result of the simulations. The sensors are fabricated by lithograpy and etching.
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