J-GLOBAL ID:200904052601322012  Research Project code:9800020685 Update date:Feb. 27, 2003

Development of tactile microsensors

Study period:1993 - 1993
Organization (1):
Investigating Researcher (4):
Research overview:
The tactile sensors are developed by using the micromachining techniques. The stress-strain of the sensors are simulated by a computer, and the stracture of it is decided by the result of the simulations. The sensors are fabricated by lithograpy and etching.
Keywords (8):
sensor ,  tactile ,  micromachining ,  computer ,  strain ,  stress(mechanics) ,  lithography ,  etching
Research program: Ordinary Research
Research budget: 1993: \34,000,000

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