Proj
J-GLOBAL ID:200904055431581335  Research Project code:9800036897 Update date:Feb. 02, 2006

Estimation of linear and angular dimensions and geometrical deviation for small mechanical elements and small optical elements

微小要素の寸法形状の評価法に関する研究
Study period:1995 - 1997
Organization (1):
Investigating Researcher (4):
Keywords (5):
measuring instrument ,  shape measurement ,  length measurement ,  machine element ,  optical system.
Research program: Ordinary Research
Research budget: 1996: \45,700,000

Return to Previous Page