Proj
J-GLOBAL ID:200904067399934865  Research Project code:9800030634 Update date:Mar. 15, 2006

Study on new device process technique

新デバイスプロセス技術の研究
Study period:1994 - 1997
Organization (1):
Investigating Researcher (1):
Keywords (5):
micro ,  ion ,  scanning ,  atomic ,  probe
Research program: Ordinary Research
Ministry with control over the research :
Ministry of Economy, Trade and Industry
Research budget: 1997: \4,800,000

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