Proj
J-GLOBAL ID:200904068750232780  Research Project code:9800011540 Update date:Nov. 04, 2003

Improvement of metal mask accuracy

メタルマスクの高精度化
Study period:1991 - 1992
Organization (1):
Investigating Researcher (3):
Keywords (5):
printed ,  printed ,  etching ,  photomask ,  metallic
Research program: Ordinary Research

Return to Previous Page